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arxiv:2509.19003

Unveiling Chain of Step Reasoning for Vision-Language Models with Fine-grained Rewards

Published on Sep 23, 2025
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Abstract

A framework for step-level reasoning in vision-language models improves performance and enables accurate evaluation of intermediate reasoning steps through reinforcement learning.

Chain of thought reasoning has demonstrated remarkable success in large language models, yet its adaptation to vision-language reasoning remains an open challenge with unclear best practices. Existing attempts typically employ reasoning chains at a coarse-grained level, which struggles to perform fine-grained structured reasoning and, more importantly, are difficult to evaluate the reward and quality of intermediate reasoning. In this work, we delve into chain of step reasoning for vision-language models, enabling assessing reasoning step quality accurately and leading to effective reinforcement learning and inference-time scaling with fine-grained rewards. We present a simple, effective, and fully transparent framework, including the step-level reasoning data, process reward model (PRM), and reinforcement learning training. With the proposed approaches, our models set strong baselines with consistent improvements on challenging vision-language benchmarks. More importantly, we conduct a thorough empirical analysis and ablation study, unveiling the impact of each component and several intriguing properties of inference-time scaling. We believe this paper serves as a baseline for vision-language models and offers insights into more complex multimodal reasoning. Our dataset, PRM, and code will be available at https://github.com/baaivision/CoS.

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